Inverters

MF pulsed DC Magnetron Power Supplies IMPS 10/15/20

This new line of inverter type unipolar, middle frequency (MF) pulsed DC power supplies, working at fixed 100 kHz output frequency, are especially designed to supply power to magnetron cathodes with appropriate dimensions and impedance of generated plasmas. These power supplies were developed for reactive sputter deposition applications to meet the requirements of deposition of highly insulating thin films from elemental or alloyed metallic targets, such as TiO2, SiO2, Ta2O5, Al2O3, SiN, AlN, etc. The pulse shape, that power supply provides, is designed such a way to provide higher degree of ionization in comparison with the other pulsed DC power supplies and is similar with the pulse shape in HIPIMS: we added on the front edge of the pulse short, 500 ns long, high voltage, low average current peak, superimposed with the basic average voltage pulse. It significantly increases the electron emission, ionization and current rise on the front edge of the pulse and enables limiting of voltage magnitude and duration of the main pulse, thus enabling use of smaller output inductor. The arc quenching circuitry response time is as short as 150 ns and the typical value of the output inductor of 30 – 40 uH, together with the use of so called Soft Arc Handling mode, provides very low energy, delivered in a single arc, less than 1 mJ/kW.
Reactive magnetron sputter deposition of highly insulating thin films. Sputter deposition of hard to manage materials, like Aluminium, Zinc, etc. This line of power supplies can be used to prevent arcing during the reactive sputter deposition. These can be used to supply power for glow discharge cleaning or ion etching of the substrates, too, in case of appropriate impedance of the resulted plasmas.

Description	Unit	IMPS 10	IMPS 15	IMPS 20
Line voltage and current	V; A	220-230/ 5,5	220-230/ 8	220-230/ 10
Line frequency	Hz	50/ 60	50/ 60	50/ 60
Line-to-Output Efficiency	%	>85%	>85%	>85%
Power limit	kW	1,1	1,65	2,2
Output frequency	kHz	100	100	100
Duty cycle range	%	0 to 75	0 to 75	0 to 75
Power adjustment range	kW	0,05 to 1,0	0,08 to 1,5	0,1 to 2,0
Current adjustment range (norm. Z)	A	0,1 to 2,2	0,12 to 3,2	0,15 to 4,2
Regulation modes		Amps, Watts	Amps, Watts	Amps, Watts
Load Regulation, 4:1 imped. change	%	2	2	2
Weight	kg	4,5	4,8	4,8

Cooling system	forced air, bottom and top cover in, rear panel out.
Front panels
Active front panel	provides complete control and process monitoring
Remote control	provides remote control and monitoring functions
Housing	½ 19” rack module
Dimensions (W x H x D)
Front panel	218 x 146 mm
Case	218 x 132 x 330 mm
Standard Connectors
Output connector	N connector, female
Cooling water control	Four-pin connector
Safety compliance	EN61010-1:1993/A2:1995
EMC compliance	EN50081-2: 1992 EN50082-2: 1995
Environmental conditions
Operating Temperature	5 to 35 °C
Relative Humidity	75% RH
Max. Operating Altitude	2000 m above the sea level

According to our years of experience in manufacturing and servicing the MF pulsed DC magnetron power supplies all around the world, we claim, that our products are thoroughly tested and are rugged and reliable. All parts and labour are covered with standard two-years warranty.

NOTE
Specifications are subject of change without notice