High Vacuum Systems
Family
of High Vacuum Plants
for Button's Metallization
of High Vacuum Plants
for Button's Metallization
High Vacuum Plant
For Triode Cathode Sputtering
of A2B6 Compounds
For Triode Cathode Sputtering
of A2B6 Compounds
Few different High Vacuum Systems for thin film deposition was developed to satify various customer needs. There were realised various deposition technologies:
- thermal evaporation
- reactive magnetron sputtering
- triode cathode sputtering of A2B6 compounds
- reactive cathodic arc evaporation